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¿µ¹®Ç¥Áظí Characterization Method for Mechanical Characteristics of a Capacitive MEMS Microphone
Çѱ۳»¿ë¿ä¾à ÁÖ¿ä ³»¿ëÀ¸·Î´Â ÃʼÒÇü Á¤Àü¿ë·®Çü ¸â½º ¸¶ÀÌÅ©·ÎÆùÀ» Á¤ÀÇÇÏ°í µ¿ÀÛ ¿ø¸®¸¦ ¼³¸íÇϸç, ±â°èÀûÀΠƯ¼ºÀÇ Æò°¡¿¡ ÇÊ¿äÇÑ ÃøÁ¤ ±¸¼º Ç׸ñÀ» ³ª¿­ÇÏ°í ÃøÁ¤ ¼ø¼­ ¹× ÃøÁ¤ ¹æ¹ýÀ» ¼³¸íÇÑ µÚ Ư¼º Æò°¡¸¦ À§ÇÑ ¿ä±¸ ±âÁØÀ» Á¦Á¤ÇÑ´Ù.
¿µ¹®³»¿ë¿ä¾à This standard defines subminiature capacitive MEMS microphone. This standard describes operation principles, list of measurement configuration items for characteristics evaluation and measurement procedure and method. And finally, this standard specifics required standards for characteristic evaluation.
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