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ÇѱÛÇ¥ÁØ¸í ¸â½º ±¸Á¶Ã¼¿¡¼­ÀÇ Torsion Èû ÃøÁ¤¿ë ÆÐÅÏ Áöħ: Part I – ±âÃÊÆÐÅÏ
¿µ¹®Ç¥Áظí Guide for the torsion force measurement patterns in MEMS structures: Part I – Basic patterns
Çѱ۳»¿ë¿ä¾à ¸â½º±¸Á¶Ã¼¿¡¼­ ºñƲ¸² ÈûÀÇ ÃøÁ¤¿¡ ´ëÇÑ ±âº» ±Ô°Ý ¹× ±¸¼ºÇ°ÀÇ ¼¼ºÎ³»¿ë¿¡ ´ëÇÏ¿© Á¤ÀÇÇÏ°í ÀÖÀ¸¸ç, °¢°¢ÀÇ ±â´É°ú ¹°¸®ÀûÀÎ »ç¾ç¿¡ ´ëÇÏ¿© Á¤ÀÇÇÑ´Ù. ¶ÇÇÑ ±¹Á¦ Ç¥ÁØ ¹× ´Üü ±Ô°Ý µî°ú ȣȯ °¡´ÉÇϵµ·Ï Á¤ÀÇÇÏ¿© »óÈ£ ¿¬µ¿¼ºÀ» º¸ÀåÇÑ´Ù.
¿µ¹®³»¿ë¿ä¾à This standard specifies the basic standard of the composition parts, functions, and the physical specifications for torsion force measurement patterns in MEMS structures and the details of the parts. Also, this standard secures mutual linkages of international standards and group standards.
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