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Á¦°³Á¤ÀÏ | 2013-10-10 | ÃÑÆäÀÌÁö | 21 |
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¿µ¹®Ç¥Áظí | A Characterization of a MEMS Microphone - Part 2: the Measurement Method of Sensitivity on Package Level | ||
Çѱ۳»¿ë¿ä¾à | ¸â½º ¸¶ÀÌÅ©·ÎÆùÀº ¿ÜºÎ À½¾Ð¿¡ ¹ÝÀÀÇÏ¿© ÀÏÁ¤ °£°Ý º¯À§ º¯µ¿À» ¹ß»ý½ÃÅ°´Â µÎ²²°¡ ¼ö um Á¤µµÀÌ°í, ³ÐÀÌ°¡ ¼ö mm2ÀÎ ¾ãÀº À̵¿ Àü±ØÀ» ³»ÀåÇÏ°í ÀÌ¿Í ´ëÀÀµÇ´Â °íÁ¤ Àü±Ø À§¿¡ ¼ö umÀÇ °£°ÝÀ» À¯ÁöÇÏ¿© ¶° ÀÖ´Â ±¸Á¶·Î ±¸¼ºµÇ¾î ÀÖ´Ù. ¿ÜºÎ À½¾ÐÀÌ ¾ãÀº ¸âºê·¹Àο¡ °¡ÇØÁ³À» ¶§, ÀÌ´Â À½¾Ð¿¡ ¹ÝÀÀÇÏ¿© Á¤Àü ¿ë·®ÀÇ º¯È·®À» ¹ß»ý½ÃÅ°°í Àü±âÀû ½ÅÈ£·Î º¯È¯µÇ¾î ÇØ´ç ½ÅÈ£¸¦ ¾ò°Ô µÈ´Ù. °íÁ¤ Àü±Ø¿¡ ´ëÇÑ ¸âºê·¹ÀÎÀÇ º¯È·®ÀÌ Á¤Àü¿ë·®ÀÇ ¹Ì¼¼ º¯È·®À¸·Î ³ªÅ¸³ª¹Ç·Î, Àü±âÀû ½ÅÈ£·Î º¯È¯ÇØÁÖ´Â ¸®µå¾Æ¿ô ȸ·Î°¡ ¼¾¼ ´ÙÀ½ ´Ü¿¡ ¹èÄ¡µÇ¾î¾ß ÇÑ´Ù. ¸â½º ¸¶ÀÌÅ©·ÎÆùÀÇ ÃÖÁ¾ ¹Î°¨µµ¸¦ Æò°¡Çϱâ À§Çؼ´Â ¼¾¼ ÀÚüÀÇ °³È¸·Î ¹Î°¨µµ Ư¼º Æò°¡°¡ ¼±ÇàµÇ¾î¾ß Çϸç ÀÌ °ªÀ» ¹ÙÅÁÀ¸·Î ¸®µå¾Æ¿ô ȸ·ÎÀÇ ÀÔ·Â ´ÜÀÌ ±¸¼ºµÈ´Ù. Á¤Àü¿ë·®Çü ¸â½º ¸¶ÀÌÅ©·ÎÆù ¹× ¸®µå¾Æ¿ô ȸ·Î°¡ ÆÐŰ¡µÇ¸é ¹«Çâ Á¶°Ç¿¡¼ ¹Î°¨µµ Æò°¡°¡ ÀÌ·ïÁø´Ù. 1 PaÀÇ À½¾ÐÀ¸·Î ±¸µ¿µÇ´Â ½ºÇÇÄ¿ÀÇ ÀÏÁ¤ °Å¸® ¾Õ¿¡ µ¿½Ã¿¡ ³õ¿©Áö´Â ±âÁØ ¸¶ÀÌÅ©·ÎÆù°ú ½ÃÆíÀÌ ÁÖÆļö º¯È¿¡ µû¸¥ ÀÔ·Â À½¾Ð¿¡ ´ëÇÑ Ãâ·Â Àü¾Ð ½ÅÈ£·Î ¹Î°¨µµ°¡ ÃøÁ¤µÈ´Ù. ¿©±â¼, ½ÃÆíÀÇ ¹Î°¨µµ´Â ÀÌ¹Ì ¾Ë°í ÀÖ´Â ±âÁØ ¸¶ÀÌÅ©·ÎÆùÀÇ ¹Î°¨µµ¿¡ ´ëÇØ »ó´ëÀûÀ¸·Î Æò°¡µÇ¾î¾ß ÇÑ´Ù. º» Ç¥ÁØÀº ÀÌ·¯ÇÑ ¹Î°¨µµ Ư¼º Æò°¡¿¡ ´ëÇÑ ±âº» ±Ô°Ý ¹× ¼¼ºÎ ³»¿ë¿¡ ´ëÇÏ¿© Á¤ÀÇÇϸç, °¢°¢ÀÇ ±â´É°ú ¹°¸®ÀûÀÎ »ç¾çÀ» Á¤ÀÇÇÑ´Ù. | ||
¿µ¹®³»¿ë¿ä¾à | MEMS microphones are simply composed of two electrodes with a width of X mm2 and a thickness of X um, which are slightly located apart in the range of one to ten micrometers. When sound pressure is forced onto a membrane which is a moving part between two electrodes, the microphone converts the input signal from physical into electrical, and delivers the output signal to ROIC. In order to measure the sensitivity of MEMS microphone, characteristics of sensitivity of an open circuit of the electrodes should be rated at first, and based on the rating, the input stage of readout circuit is organized. After capacitive MEMS microphone and readout circuit are packaged, the sensitivity measurement is carried out under unechoic conditions. This standard specifies the basics and the details of a sensitivity characterization process in a packaged MEMS microphone. | ||
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