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Ç¥ÁعøÈ£ | TTAK.KO-10.0577 | ±¸Ç¥ÁعøÈ£ | |
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Á¦°³Á¤ÀÏ | 2012-10-09 | ÃÑÆäÀÌÁö | 21 |
ÇѱÛÇ¥Áظí | ¸â½º ¸¶ÀÌÅ©·ÎÆùÀÇ Æ¯¼º Æò°¡ - Á¦1ºÎ: °³È¸·Î ¹Î°¨µµ ÃøÁ¤ ¹æ¹ý | ||
¿µ¹®Ç¥Áظí | A Characterization of a MEMS Microphone - Part 1:the Measurement Method of Open-Circuit Sensitivity | ||
Çѱ۳»¿ë¿ä¾à | º» Ç¥ÁØÀÇ ¸ñÀûÀº ¹ÝµµÃ¼ Á¦ÀÛ °øÁ¤À» ÀÌ¿ëÇÏ¿© ´ë·®À¸·Î Á¦À۵Ǵ Á¤Àü¿ë·®Çü ¸â½º ¸¶ÀÌÅ©·ÎÆùÀÇ Àü±âÀû ¹× ±â°èÀû Ư¼º Æò°¡¸¦ ÅëÇØ ¸¶ÀÌÅ©·ÎÆù ÀÚüÀÇ ¹Î°¨µµ¸¦ Æò°¡ÇÏ´Â °ÍÀ¸·Î ¸â½º ¸¶ÀÌÅ©·ÎÆùÀÇ Á¦ÀÛµÈ Ä¨ »ó¿¡¼ °³È¸·Î ¹Î°¨µµ Ư¼º Æò°¡¸¦ À§ÇÑ ÃøÁ¤ ¼ø¼ ¹× ¹æ¹ýÀ» Á¤ÀÇÇÏ°í, ÀÌ Æ¯¼º Æò°¡ ¹× ¼º´É ¿ä±¸ »çÇ×À» Á¤ÀÇÇÏ´Â µ¥ ÀÖ´Ù. | ||
¿µ¹®³»¿ë¿ä¾à | The purpose of this standard is to evaluate microphone sensitivity through electrical and mechanical characteristic evaluation of MEMS microphone which is produced in a large quantity by semiconductor manufacturing process. This standard defines measurement procedure and method for characteristics evaluation of open-circuit sensitivity on a chip in a MEMS microphone. And also, this standard defines this characteristics evaluation and performance requirements. | ||
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