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Ç¥ÁعøÈ£ | TTAK.KO-10.0353 | ±¸ Ç¥ÁعøÈ£ | |||||||||||||||
Á¦°³Á¤ÀÏ | 2009-12-22 | ÃÑ ÆäÀÌÁö | 16 | ||||||||||||||
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¿µ¹® Ç¥Áظí | Requirements for MEMS type multiplex sensors of flow and pressure | ||||||||||||||||
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¿µ¹® ³»¿ë¿ä¾à | This standard specifies the basic standard of the composition parts, functions, and the physical specifications for flow/pressure multiplex sensors with MEMS structure and the details of the parts. Also, this standard secures mutual linkages of international standards and group standards. | ||||||||||||||||
°ü·Ã IPR È®¾à¼ | Á¢¼öµÈ IPR È®¾à¼ ¾øÀ½ | ||||||||||||||||
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