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¿µ¹® Ç¥Áظí Requirements for MEMS type multiplex sensors of flow and pressure
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¿µ¹® ³»¿ë¿ä¾à This standard specifies the basic standard of the composition parts, functions, and the physical specifications for flow/pressure multiplex sensors with MEMS structure and the details of the parts. Also, this standard secures mutual linkages of international standards and group standards.
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