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Ç¥ÁعøÈ£ | TTAK.KO-10.0356 | ±¸Ç¥ÁعøÈ£ | |
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Á¦°³Á¤ÀÏ | 2009-12-22 | ÃÑÆäÀÌÁö | 16 |
ÇѱÛÇ¥Áظí | ¸â½º ±¸Á¶Ã¼¿¡¼ÀÇ Torsion Èû ÃøÁ¤¿ë ÆÐÅÏ Áöħ: Part I – ±âÃÊÆÐÅÏ | ||
¿µ¹®Ç¥Áظí | Guide for the torsion force measurement patterns in MEMS structures: Part I – Basic patterns | ||
Çѱ۳»¿ë¿ä¾à | ¸â½º±¸Á¶Ã¼¿¡¼ ºñƲ¸² ÈûÀÇ ÃøÁ¤¿¡ ´ëÇÑ ±âº» ±Ô°Ý ¹× ±¸¼ºÇ°ÀÇ ¼¼ºÎ³»¿ë¿¡ ´ëÇÏ¿© Á¤ÀÇÇÏ°í ÀÖÀ¸¸ç, °¢°¢ÀÇ ±â´É°ú ¹°¸®ÀûÀÎ »ç¾ç¿¡ ´ëÇÏ¿© Á¤ÀÇÇÑ´Ù. ¶ÇÇÑ ±¹Á¦ Ç¥ÁØ ¹× ´Üü ±Ô°Ý µî°ú ȣȯ °¡´ÉÇϵµ·Ï Á¤ÀÇÇÏ¿© »óÈ£ ¿¬µ¿¼ºÀ» º¸ÀåÇÑ´Ù. | ||
¿µ¹®³»¿ë¿ä¾à | This standard specifies the basic standard of the composition parts, functions, and the physical specifications for torsion force measurement patterns in MEMS structures and the details of the parts. Also, this standard secures mutual linkages of international standards and group standards. | ||
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