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¿µ¹®Ç¥Áظí A Characterization of a MEMS Microphone - Part 1:the Measurement Method of Open-Circuit Sensitivity
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¿µ¹®³»¿ë¿ä¾à The purpose of this standard is to evaluate microphone sensitivity through electrical and mechanical characteristic evaluation of MEMS microphone which is produced in a large quantity by semiconductor manufacturing process. This standard defines measurement procedure and method for characteristics evaluation of open-circuit sensitivity on a chip in a MEMS microphone. And also, this standard defines this characteristics evaluation and performance requirements.
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