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Ç¥ÁعøÈ£ TTAK.KO-10.0486 ±¸Ç¥ÁعøÈ£
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¿µ¹®Ç¥Áظí An electrical characterization method on a wafer in a capacitive MEMS microphone
Çѱ۳»¿ë¿ä¾à Á¤Àü¿ë·®Çü ¸â½º ¸¶ÀÌÅ©·ÎÆùÀº µÎ²²°¡ ¼ö um Á¤µµÀÌ°í ³ÐÀÌ°¡ ¼ö mm2 ÀÎ ¾ãÀº
Àü±ØÀ» ³»ÀåÇÏ°í °íÁ¤ Àü±Ø À§¿¡ ¼ö um ÀÇ °£°ÝÀ» À¯ÁöÇÏ¿© ¶°ÀÖ´Â ±¸Á¶·Î ±¸¼ºµÇ¾î
ÀÖ´Ù. ¿ÜºÎ À½¾ÐÀÌ ¾ãÀº ¸âºê·¹Àο¡ °¡ÇØÁ³À» ¶§, ÀÌ´Â À½¾Ð¿¡ ¹ÝÀÀÇÏ¿© Á¤Àü¿ë·®ÀÇ
º¯È­·®À» ¹ß»ýÇϰԵǰí Àü±âÀû ½ÅÈ£·Î º¯È¯µÇ¾î ÇØ´ç ½ÅÈ£¸¦ ¾ò°Ô µÈ´Ù. °íÁ¤Àü±Ø¿¡
´ëÇÑ ¸âºê·¹ÀÎÀÇ º¯È­·®ÀÌ Á¤Àü¿ë·®ÀÇ ¹Ì¼¼ º¯È­·®À¸·Î ³ªÅ¸³ª¹Ç·Î, Àü±âÀû ½ÅÈ£·Î
º¯È¯ÇØÁÖ´Â ROIC(read- out IC, ¼¾¼­ÀÎÅÍÆäÀ̽ºÈ¸·Î)°¡ ¼¾¼­ ´ÙÀ½ ´Ü¿¡ ¹èÄ¡µÇ¾î¾ß ÇÑ´Ù.
¶ÇÇÑ, ROIC ´Â ³ôÀº Ãâ·Â ÀÓÇÇ´ø½º¸¦ ³·Àº ÀÓÇÇ´ø½º·Î º¯È¯ÇØÁÖ´Â ¿ªÇÒÀ» ÇÑ´Ù. µû¶ó¼­,
¿ì¼öÇÑ SNR(signal- to- noise ratio, ½ÅÈ£´ëÀâÀ½ºñ)À» ¾ò±â À§Çؼ­´Â ¼¾¼­ ÀÚüÀÇ Àü±âÀû
Ư¼º Æò°¡°¡ Á¤È®ÇÏ°Ô ÀÌ·ç¾îÁ® ÀÌ °ªÀ» ¹ÙÅÁÀ¸·Î ROIC ÀÇ ÀÔ·Â ´ÜÀÌ ±¸¼ºµÇ¾î¾ß ÇÑ´Ù.
¶ÇÇÑ, µ¿ÀÛ Æ¯¼ºÀ» Æò°¡Çϱâ À§Çؼ­´Â Àü±âÀû Ư¼ºÆò°¡¿Í ´õºÒ¾î ±â°èÀû Æò°¡µµ
ÀÌ·ïÁ®¾ß¸¸ ÇÑ´Ù. ¸âºê·¹ÀÎÀº °íÁ¤ Àü±Ø À§¿¡ ÀÏÁ¤°£°Ý ¶°ÀÖ´Â ±¸Á¶À̱⠶§¹®¿¡ ¿ì¼±
¼¾¼­ ÀÚüÀÇ Áø¼º¼ººÐ ijÆнÃÅϽº °ªÀ» ¾ò±â À§Çؼ­´Â ¸âºê·¹ÀÎÀÇ ´ÜÂ÷¸¦ ÃøÁ¤ÇÏ¿©¾ß
ÇÑ´Ù. µû¶ó¼­, ¸âºê·¹ÀÎÀÇ ±â°èÀû Ư¼º Æò°¡¸¦ ÇÑ ÈÄ À̸¦ ¹ÙÅÁÀ¸·Î Àü±âÀû Ư¼º Æò°¡°¡
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Á¤ÀÇÇϸç, °¢°¢ÀÇ ±â´É°ú ¹°¸®ÀûÀÎ »ç¾ç¿¡ ´ëÇÏ¿©µµ Á¤ÀÇÇÑ´Ù. ¶ÇÇÑ ±¹Á¦ Ç¥ÁØ ¹× ´Üü
±Ô°Ý µî°ú ȣȯ °¡´ÉÇϵµ·Ï Á¤ÀÇÇÏ¿© »óÈ£ ¿¬µ¿¼ºÀ» º¸ÀåÇÑ´Ù.
¿µ¹®³»¿ë¿ä¾à This standard specifies a basic standard of an electrical characterization process on
a wafer in a capacitive MEMS microphone. As a capacitive MEMS sensor is equipped
with ROIC, which transforms a mechanical signal into an electrical signal. So, ahead of
the connection between the sensor part and ROIC, an electrical characterization for
the sensor part has to be exactly evaluated in order to be linked the ROIC module
without being deteriorated on the output voltage. Thus, this standard secures mutual
linkages of international standards and group standards.
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