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Ç¥ÁعøÈ£ | TTAK.KO-10.0353 | ±¸Ç¥ÁعøÈ£ | |
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Á¦°³Á¤ÀÏ | 2009-12-22 | ÃÑÆäÀÌÁö | 16 |
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¿µ¹®Ç¥Áظí | Requirements for MEMS type multiplex sensors of flow and pressure | ||
Çѱ۳»¿ë¿ä¾à | ¸â½º ±â·ù/±â¾Ð º¹ÇÕ¼¾¼¿¡ ´ëÇÑ ±âº» ±Ô°Ý ¹× ±¸¼ºÇ°ÀÇ ¼¼ºÎ³»¿ë¿¡ ´ëÇÏ¿© Á¤ÀÇÇÏ°í ÀÖÀ¸¸ç, °¢°¢ÀÇ ±â´É°ú ¹°¸®ÀûÀÎ »ç¾ç¿¡ ´ëÇÏ¿© Á¤ÀÇÇÑ´Ù. ¶ÇÇÑ ±¹Á¦ Ç¥ÁØ ¹× ´Üü ±Ô°Ý µî°ú ȣȯ °¡´ÉÇϵµ·Ï Á¤ÀÇÇÏ¿© »óÈ£ ¿¬µ¿¼ºÀ» º¸ÀåÇÑ´Ù. | ||
¿µ¹®³»¿ë¿ä¾à | This standard specifies the basic standard of the composition parts, functions, and the physical specifications for flow/pressure multiplex sensors with MEMS structure and the details of the parts. Also, this standard secures mutual linkages of international standards and group standards. | ||
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