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¿µ¹®Ç¥Áظí A Characterization of a MEMS Microphone - Part 2: the Measurement Method of Sensitivity on Package Level
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¿µ¹®³»¿ë¿ä¾à MEMS microphones are simply composed of two electrodes with a width of X mm2 and a thickness of X um, which are slightly located apart in the range of one to ten micrometers. When sound pressure is forced onto a membrane which is a moving part between two electrodes, the microphone converts the input signal from physical into electrical, and delivers the output signal to ROIC. In order to measure the sensitivity of MEMS microphone, characteristics of sensitivity of an open circuit of the electrodes should be rated at first, and based on the rating, the input stage of readout circuit is organized. After capacitive MEMS microphone and readout circuit are packaged, the sensitivity measurement is carried out under unechoic conditions. This standard specifies the basics and the details of a sensitivity characterization process in a packaged MEMS microphone.
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